Anelva Data Sheet

Synthesis of Catalysts for Uniform Diameter Single-Walled Carbon Nanotubes

ANELVA Sputtering Chamber Data Sheet

Sample Group Name

Date of Sample Sputter

Target Other

Substrate Other

Shadow Mask

Sputtering Time : :

Target to Substrate Distance

Data 1: Initial Changes to Sputtering Chamber

Change 1 Change 2 Change 3 Change 4 Change 5

Data 2: Pressure on PG2 after turbo pump vacuum for ~ 1 hour

Start Time: : :

End Time: : :

Pressure: mtorr

Data 3: Pressure on PG2 after Ar gas & Turbo Pump Speed

Time: : :

Pressure: mtorr

Turbo Pump Speed: rpm

Data 4: Initial ENI parameters

W Ramp Run

Pulse Frequency: kHz

PulseWidth: ns

Mech Arc

Pulse Mode

Data 5: Pre-Sputtering

Start Time: : :

Overvoltage

Data 6: Adjusted ENI param. (if necessary) and Plasma Emergence

Adjustment 1

W Ramp Run

Pulse Frequency: kHz

PulseWidth: ns

Mech Arc

Pulse Mode

Adjustment 2

W Ramp Run

Pulse Frequency: kHz

Pulse Width: ns

Mech Arc

Pulse Mode

Plasma Emergence Time: : Used Valve 3

Data 7: Pre-Sputtering Conditions

Volts

Amps

Watts

Data 8: Initial Deposition Conditions

Time: : :

Volts

Amps

Watts

Data 9: Intermediate Sputtering Conditions

Time: : :

Volts

Amps

Watts

Data 10: Pressure on PG2 after argon gas is deployed

Time: : :

Pressure: mtorr

Data 11: Leak/Out Gas Rate

~ mtorr/min